Anodic Polarization Behavior and Surface Films of CVD-SiC in Aqueous Solutions
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چکیده
منابع مشابه
Evaluation of Electrical Breakdown of Anodic Films on Titanium in Phosphate-base Solutions
Titanium is a highly reactive metal so that a thin layer of oxide forms on its surface whenever exposed to the air or other environments containing oxygen. This layer increases the corrosion resistance of titanium. The oxide film is electrochemically formed through anodizing. In this study, anodizing of titanium was performed in phosphate-base solutions such as H3Po4, NaH2Po4, and Na2Hpo4 at 9....
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15 صفحه اولFluorinated SiC CVD
For the emerging semiconductor material silicon carbide (SiC) used in high power devices, chemical vapor deposition (CVD) is the most prominent method to create the electrically active SiC epitaxial layers in the device. The process of growing such epitaxial layers is to use a hydrocarbon and silane diluted in hydrogen flow through a hot chamber where chemical reactions take place in such a man...
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ژورنال
عنوان ژورنال: Journal of the Japan Institute of Metals and Materials
سال: 1993
ISSN: 0021-4876,1880-6880
DOI: 10.2320/jinstmet1952.57.10_1166